Nyob rau hauv qhov kev hloov pauv sai sai ntawm cov zaj duab xis nyias nyias,cov hom phiaj tooj liab uas muaj purity siabtxuas ntxiv ua lub luag haujlwm tseem ceeb hauv kev ua kom muaj kev tsim khoom semiconductor siab heev, cov thev naus laus zis tso saib, thiab cov kev daws teeb meem zog rov ua dua tshiab. Nrog rau kev thov thoob ntiaj teb rau cov khoom siv hluav taws xob me dua, sai dua, thiab ua haujlwm tau zoo dua uas tsav tsheb tsim kho tshiab, tooj liab txoj kev ua hluav taws xob zoo tshaj plaws thiab kev sib raug zoo nrog cov txheej txheem vapor deposition (PVD) ua rau cov hom phiaj no tsis tseem ceeb. Thaum tus nqi tooj liab ruaj khov ntawm qib siab hauv xyoo 2026, kev tsom mus rau kev lag luam tau hloov mus rau ultra-high-purity (4N–6N) lub hom phiaj uas ua kom cov yeeb yaj kiab nyias tsis muaj qhov tsis zoo thiab cov txheej txheem zoo dua.

Tsab xov xwm no tshuaj xyuas cov hom phiaj tseem ceeb ntawm cov hom phiaj tooj liab sputtering, lawv cov haujlwm tshwj xeeb, cov lag luam tseem ceeb, thiab cov khoom siv uas ua rau tooj liab tsis tuaj yeem hloov pauv tau hauv cov xwm txheej tseem ceeb.

Ntau hom kev siv lub hom phiaj sputtering siab, suav nrog cov phaj planar rectangular, cov duab tshwj xeeb, thiab cov khoom sib txuas uas feem ntau siv hauv cov tshuab magnetron sputtering.

Cov Hom Phiaj Tooj Liab Sputtering thiab Lawv Cov Haujlwm

Cov hom phiaj tooj liab sputtering yog tsim los rau cov lus qhia meej, feem ntau nrog cov qib purity ntawm 99.99% (4N) txog 99.9999% (6N), cov qauv zoo, thiab qhov ceev siab (> 99%). Cov ntawv tseem ceeb suav nrog:

1. Lub Hom Phiaj Planar(Cov Phaj Plaub fab los yog Cov Phaj Plaub fab)Qhov kev teeb tsa feem ntau rau cov txheej txheem magnetron sputtering txheem. Cov hom phiaj tiaj tiaj no muab kev sib txhuam sib npaug thiab kev siv cov khoom siv siab hauv cov ntawv thov txheej loj.
2. Lub Hom Phiaj Disc Voj Voog Zoo tagnrho rau kev tshawb fawb, kev txhim kho, thiab kev tsim cov cathodes me me. Cov discs muaj kev sib raug zoo heev nrog cov magnetrons rotary lossis stationary, ua rau muaj kev tswj hwm qhov tuab ntawm zaj duab xis.
3. Cov Hom Phiaj Rotary (Cylindrical lossis Tubular)Tsim los rau cov tshuab magnetron uas tig tau, cov no tso cai rau kev siv cov khoom siv ntau dua (txog li 80–90%) piv rau cov hom phiaj planar, ua rau lawv nyiam rau cov kab txheej txheem kev lag luam ntau.
4. Cov Hom Phiaj Sib TxuasLub hom phiaj yog indium-bonded lossis elastomer-bonded rau tooj liab lossis molybdenum backing plates rau kev tswj hwm thermal thiab kev ruaj khov kho thaum lub sijhawm muaj zog siab sputtering.

Cov ntawv no, muaj nyob rau hauv tus qauv thiab kev cai tooj liab sputtering lub hom phiaj, yog tsim los rau qhov zoo tshaj plaws plasma stability, tsawg kawg nkaus particle tiam, thiab sib xws deposition nqi.

Cov Lag Luam Tseem Ceeb Siv Cov Hom Phiaj Tooj Liab Sputtering hauv xyoo 2026

Cov hom phiaj tooj liab uas muaj purity siab yog qhov tseem ceeb thoob plaws ntau qhov kev lag luam loj hlob:

• Kev Tsim Khoom Siv Semiconductor→ Cov yeeb yaj kiab tooj liab ua haujlwm ua cov txheej noob thiab cov txheej thaiv hauv cov txheej txheem damascene rau kev sib txuas hauv cov nodes siab heev (sub-5nm).
• Cov Zaub Vaj Huam Sib Luag→ Siv rau hauv TFT-LCD, AMOLED, thiab cov zaub yooj ywm rau cov electrodes rooj vag, cov kab qhov chaw / ntws dej, thiab cov txheej reflective.
• Cov khoom siv photovoltaic→ Tseem ceeb rau CIGS (tooj liab indium gallium selenide) cov hlwb nyias nyias thiab cov qauv perovskite tandem.
• Cov Khoom Siv Kho Kom Zoo Nkauj thiab Cov Khoom Siv Kho Kom Zoo Nkauj→ Siv rau hauv cov iav vaj tse, cov iav tsheb, thiab cov tshuaj tiv thaiv kev cuam tshuam.
• Kev Khaws Cov Ntaub Ntawv thiab MEMS→ Siv rau hauv cov ntaub ntawv kaw suab sib nqus thiab cov tshuab micro-electro-mechanical.

Nrog rau kev nthuav dav ntawm AI chips, 5G/6G infrastructure, thiab lub zog rov ua dua tshiab, qhov xav tau ntawm kev txhim khu kev qhacov hom phiaj tooj liab uas muaj purity siabtseem muaj zog.

Cov txiaj ntsig tseem ceeb thiab vim li cas tooj liab tseem tsis hloov pauv tau

Cov hom phiaj tooj liab sputtering muaj ntau yam kev zoo uas lwm txoj hauv kev nyuaj rau phim:

1. Kev Ua Hluav Taws Xob Zoo Tshaj Plaws— Tooj liab muab qhov tsis kam tiv taus qis tshaj plaws (~ 1.68 µΩ·cm) ntawm cov hlau feem ntau, ua rau RC qeeb dua thiab ua haujlwm tau zoo dua.
2. Kev Ua Yeeb Yam Zoo Kawg Nkaus thiab Kev Sib Txuas Lus— Cov hom phiaj zoo tsim cov yeeb yaj kiab ntom ntom, tsis muaj qhov tsis zoo nrog cov kauj ruam zoo dua hauv cov yam ntxwv siab.
3. Kev Ua Haujlwm Thermal Siab— Pab kom muaj kev kub hnyiab zoo thaum lub sijhawm sputtering, ua rau muaj zog ntau dua thiab cov nqi tso tawm sai dua.
4. Kev Sib Haum Xeeb Nrog Cov Txheej Txheem Uas Muaj Lawm— Kev sib koom ua ke zoo rau hauv cov cuab yeej PVD laus uas muaj teeb meem tsawg kawg nkaus arcing lossis cov khoom me me thaum siv cov hom phiaj zoo.
5. Kev nthuav dav uas pheej yig— Txawm hais tias tus nqi khoom siv raw khoom siab heev, tooj liab muab qhov kev ua tau zoo tshaj plaws-rau-tus nqi piv rau qhov ntau lawm.

Kev Hloov Tsis Tau Hauv Cov Ntawv Thov Tseem CeebTxawm hais tias txhuas tau siv rau kev sib txuas, kev siv tooj liab thaum xyoo 1990s (IBM txoj kev siv damascene) tau txhim kho qhov ceev ntawm cov chip thiab kev siv hluav taws xob zoo dua qub - cov txiaj ntsig uas txhuas tsis tuaj yeem rov ua dua vim muaj kev tiv taus siab dua. Lwm txoj hauv kev zoo li nyiaj raug kev txom nyem los ntawm teeb meem electromigration, thaum ruthenium lossis cobalt tsuas yog tseg rau cov teeb meem ultra-thin xwb. Hauv kev sib txuas semiconductor thiab cov ntawv thov siab, kev hloov tooj liab yuav ua rau muaj kev siv hluav taws xob ntau ntxiv, kev tsim cua sov, thiab qhov loj ntawm lub pwm - ua rau nws tsis tuaj yeem hloov pauv tau raws li cov phiaj xwm thev naus laus zis tam sim no thiab pom tau.

Kev Pom Zoo: Kev Ruaj Ntseg Kev Muab Khoom Hauv Kev Lag Luam Muaj Kev Xav Tau Ntau

Thaum cov chaw tsim khoom thawb mus rau qib angstrom-level precision hauv xyoo 2026, kev koom tes nrog cov neeg muab khoom muab cov hom phiaj tooj liab uas muaj ntawv pov thawj siab, kev tswj cov noob kom meej, thiab kev taug qab tag nrho yog qhov tseem ceeb zuj zus.

Peb muaj ntau yam khoom siv rau kev xa khoom sai thiab kev txhawb nqa los ntawm cov kws tshaj lij.sputtering lub hom phiaj catalog or tiv tauj peb cov kws tshwj xeebrau cov kev daws teeb meem tshwj xeeb hauv kev siv semiconductor, zaub, lossis hnub ci.

Cov hom phiaj tooj liab uas muaj cov xim ntshiab siab txuas ntxiv ua kom muaj zog rau cov thev naus laus zis uas tsim tag kis - xa cov kev ua tau zoo uas tsis muaj lwm yam hloov tau.